Method for endurance optimization of the HIMOS/spl trade/ flash memory cell
A negative oxide charge located at the split-point is the main cause of threshold voltage window closure in source side injection flash EEPROM cells under 10/sup 5/ write/erase cycles. We show a slow trapping rate and a temperature dependence of the detrapping rate below 100/spl deg/C. The detrappin...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | A negative oxide charge located at the split-point is the main cause of threshold voltage window closure in source side injection flash EEPROM cells under 10/sup 5/ write/erase cycles. We show a slow trapping rate and a temperature dependence of the detrapping rate below 100/spl deg/C. The detrapping rate is not temperature dependent between 100/spl deg/C and 250/spl deg/C. Finally, the split-point charge formation can be significantly reduced by using of a ramped write pulse. |
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ISSN: | 1541-7026 1938-1891 |
DOI: | 10.1109/RELPHY.2005.1493193 |