Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm

Thermal effect plays an important role during frequency tripled nanosecond Nd:YAG laser ablation of polyimide. This paper describes simulation results and experimental investigations of laser induced temperature change in polyimide. The experimental results show that the ablation rate is temperature dependent, which means the underlying copper layer and the pulse repetition frequency (PRF) influence the etch depth. Based on our model it is possible to control the processing parameters according to the pattern geometry for a better exploitation of laser micromachining