White light interferometry, a method for optical 3D-inspection of advanced packages

White light interferometry, a method for optical 3D-inspection of advanced packages

White light interferometry is a measuring method to acquire the shape of 3D surfaces very accurately. The paper presents an analysis of white light interferometry for its applicability in sensors for the assembly process of advanced packages. Aspects of the realization and the practical use of this...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Schaulin, M., Wolter, K.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
and manufacturing technology
Assembly
Components
Interference
Microscopy
Mirrors
Optical interferometry
Optical scattering
Optical sensors
packaging
Semiconductor device packaging
Shape measurement
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Beschreibung
Zusammenfassung:White light interferometry is a measuring method to acquire the shape of 3D surfaces very accurately. The paper presents an analysis of white light interferometry for its applicability in sensors for the assembly process of advanced packages. Aspects of the realization and the practical use of this measuring method for area array components are discussed.
DOI:10.1109/ISSE.2004.1490373