Fabrication of microsensor and microactuator elements by the LIGA-process

By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mohr, J., Bley, P., Burbaum, C., Menz, W., Wallrabe, U.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Axles Capacitance Electrostatics Fabrication Frequency Friction Microactuators Microsensors Optical fibers
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