Fabrication of microsensor and microactuator elements by the LIGA-process

Fabrication of microsensor and microactuator elements by the LIGA-process

By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated....

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Bibliographische Detailangaben
Hauptverfasser: Mohr, J., Bley, P., Burbaum, C., Menz, W., Wallrabe, U.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acceleration
Axles
Capacitance
Electrostatics
Fabrication
Frequency
Friction
Microactuators
Microsensors
Optical fibers
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Beschreibung
Zusammenfassung:By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated. Their characteristics and results concerning their behavior are presented.< >
DOI:10.1109/SENSOR.1991.148951