First results on the characterization of new semitransparent amorphous silicon sensors
This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the...
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| Veröffentlicht in: | IEEE transactions on instrumentation and measurement 2005-08, Vol.54 (4), p.1422-1426 |
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| container_title | IEEE transactions on instrumentation and measurement |
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| creator | Calderon, A. Virto, A.L. Raigon, J.M.L. |
| description | This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the visible higher than 80%. In addition, the sensitive area is very large: 30/spl times/30 cm/sup 2/. |
| doi_str_mv | 10.1109/TIM.2005.851231 |
| format | Article |
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In addition, the sensitive area is very large: 30/spl times/30 cm/sup 2/.</description><identifier>ISSN: 0018-9456</identifier><identifier>EISSN: 1557-9662</identifier><identifier>DOI: 10.1109/TIM.2005.851231</identifier><identifier>CODEN: IEIMAO</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Alignment ; Amorphous silicon ; amorphous silicon sensors ; Character generation ; Deflection ; Detectors ; Instrumentation ; Laser beams ; Magnetic sensors ; Mechanical sensors ; Optical sensors ; position-sensing detectors ; Reconstruction ; Sensor phenomena and characterization ; Sensors ; silicon sensors ; Strips ; Thin film sensors ; transparent position detectors</subject><ispartof>IEEE transactions on instrumentation and measurement, 2005-08, Vol.54 (4), p.1422-1426</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2005</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c351t-977c54ff031ed39cc5bbb3463c0d97f7cb6097be2ecf7162533275ba63315fb23</citedby><cites>FETCH-LOGICAL-c351t-977c54ff031ed39cc5bbb3463c0d97f7cb6097be2ecf7162533275ba63315fb23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1468548$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1468548$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Calderon, A.</creatorcontrib><creatorcontrib>Virto, A.L.</creatorcontrib><creatorcontrib>Raigon, J.M.L.</creatorcontrib><title>First results on the characterization of new semitransparent amorphous silicon sensors</title><title>IEEE transactions on instrumentation and measurement</title><addtitle>TIM</addtitle><description>This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the visible higher than 80%. In addition, the sensitive area is very large: 30/spl times/30 cm/sup 2/.</description><subject>Alignment</subject><subject>Amorphous silicon</subject><subject>amorphous silicon sensors</subject><subject>Character generation</subject><subject>Deflection</subject><subject>Detectors</subject><subject>Instrumentation</subject><subject>Laser beams</subject><subject>Magnetic sensors</subject><subject>Mechanical sensors</subject><subject>Optical sensors</subject><subject>position-sensing detectors</subject><subject>Reconstruction</subject><subject>Sensor phenomena and characterization</subject><subject>Sensors</subject><subject>silicon sensors</subject><subject>Strips</subject><subject>Thin film sensors</subject><subject>transparent position detectors</subject><issn>0018-9456</issn><issn>1557-9662</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp90TtLA0EQB_BFFIyP2sLmsNDqkn3cvkoRo0LEJtoue5s5suFyF3c2iH56L0QQLKwGht8MM_wJuWB0zBi1k_nT85hTKsdGMi7YARkxKXVpleKHZEQpM6WtpDomJ4grSqlWlR6Rt2lMmIsEuG0zFn1X5CUUYemTDxlS_PI5Ds2-KTr4KBDWMSff4cYn6HLh133aLPstFhjbGAaI0GGf8IwcNb5FOP-pp-R1ej-_eyxnLw9Pd7ezMgjJcmm1DrJqGioYLIQNQdZ1LSolAl1Y3ehQK2p1DRxCo5niUgiuZe2VEEw2NRen5Ga_d5P69y1gduuIAdrWdzCc5YxVXBhD5SCv_5XcUMq1YAO8-gNX_TZ1wxfOKC2UsmaHJnsUUo-YoHGbFNc-fTpG3S4ON8ThdnG4fRzDxOV-IgLAr66UkZUR3wBbhtE</recordid><startdate>20050801</startdate><enddate>20050801</enddate><creator>Calderon, A.</creator><creator>Virto, A.L.</creator><creator>Raigon, J.M.L.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| identifier | ISSN: 0018-9456 |
| ispartof | IEEE transactions on instrumentation and measurement, 2005-08, Vol.54 (4), p.1422-1426 |
| issn | 0018-9456 1557-9662 |
| language | eng |
| recordid | cdi_ieee_primary_1468548 |
| source | IEEE Electronic Library (IEL) |
| subjects | Alignment Amorphous silicon amorphous silicon sensors Character generation Deflection Detectors Instrumentation Laser beams Magnetic sensors Mechanical sensors Optical sensors position-sensing detectors Reconstruction Sensor phenomena and characterization Sensors silicon sensors Strips Thin film sensors transparent position detectors |
| title | First results on the characterization of new semitransparent amorphous silicon sensors |
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