First results on the characterization of new semitransparent amorphous silicon sensors

This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the...

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Veröffentlicht in:	IEEE transactions on instrumentation and measurement 2005-08, Vol.54 (4), p.1422-1426
Hauptverfasser:	Calderon, A., Virto, A.L., Raigon, J.M.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Alignment Amorphous silicon amorphous silicon sensors Character generation Deflection Detectors Instrumentation Laser beams Magnetic sensors Mechanical sensors Optical sensors position-sensing detectors Reconstruction Sensor phenomena and characterization Sensors silicon sensors Strips Thin film sensors transparent position detectors
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Beschreibung
Zusammenfassung:	This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the visible higher than 80%. In addition, the sensitive area is very large: 30/spl times/30 cm/sup 2/.
ISSN:	0018-9456 1557-9662
DOI:	10.1109/TIM.2005.851231