RTP uniformity improvement through simulation

RTP uniformity improvement through simulation

Some RTP chamber non-uniformity is due to the lamp arrangement geometry. An internally written simulation program was written to reproduce this non-uniformity. The results of the simulation were successfully tested against experimental results. The simulation then lead to finding lamp types and lamp...

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Bibliographische Detailangaben
Hauptverfasser: Tanasa, C., Ranish, J., Hunter, A., Ramamurthy, S., Jallepally, R., Ramachandran, B., Lai, C., Tjandra, A., Tam, N.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Collimators
Geometry
Lamps
Radio access networks
Semiconductor device modeling
Temperature
Testing
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Beschreibung
Zusammenfassung:Some RTP chamber non-uniformity is due to the lamp arrangement geometry. An internally written simulation program was written to reproduce this non-uniformity. The results of the simulation were successfully tested against experimental results. The simulation then lead to finding lamp types and lamp combination recipes which decrease overall non-uniformity in the RTP chamber by 40%
DOI:10.1109/RTP.2004.1441962