ZnO thin films growth, characteristics and applications

Undoped, n-doped and p-type ZnO as well as MgZnO alloy thin films were grown by metal-organic chemical vapor deposition (MOCVD) on sapphire. The structural, optical and electrical properties of ZnO films were investigated using X-ray diffraction (XRD), Raman spectrum, photoluminescence (PL) spectrum...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Guotong Du, Yuchun Chang, Yuantao Zhang, Yan Ma, Xiaotian Yang, Baijun Zhao
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic diffraction Chemical vapor deposition MOCVD Optical films Optical filters Optical surface waves Sputtering Transistors X-ray diffraction Zinc oxide
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