ZnO thin films growth, characteristics and applications

ZnO thin films growth, characteristics and applications

Undoped, n-doped and p-type ZnO as well as MgZnO alloy thin films were grown by metal-organic chemical vapor deposition (MOCVD) on sapphire. The structural, optical and electrical properties of ZnO films were investigated using X-ray diffraction (XRD), Raman spectrum, photoluminescence (PL) spectrum...

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Bibliographische Detailangaben
Hauptverfasser: Guotong Du, Yuchun Chang, Yuantao Zhang, Yan Ma, Xiaotian Yang, Baijun Zhao
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic diffraction
Chemical vapor deposition
MOCVD
Optical films
Optical filters
Optical surface waves
Sputtering
Transistors
X-ray diffraction
Zinc oxide
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Beschreibung
Zusammenfassung:Undoped, n-doped and p-type ZnO as well as MgZnO alloy thin films were grown by metal-organic chemical vapor deposition (MOCVD) on sapphire. The structural, optical and electrical properties of ZnO films were investigated using X-ray diffraction (XRD), Raman spectrum, photoluminescence (PL) spectrum, transmission spectra and Hall effect, respectively. ZnO ultraviolet (UV) detectors and acoustic surface wave filter (ASWF) devices were fabricated. Additionally, a new ZnO transistor structure was proposed.
DOI:10.1109/ICSICT.2004.1435321