Tunable RF MEMS elements

Tunable RF MEMS elements

A review of some of the work in tunable RF MEMS elements is presented. Discussed are a high-tuning range variable capacitor, a tunable microinductor, a switched inductor array and a MEMS capacitor immersed in a dielectric fluid. These devices expand the types of devices available to the RF designer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Tien, N.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance
Capacitors
Fingers
Inductors
Q factor
Radio frequency
Radiofrequency microelectromechanical systems
Silicon
Tuning
Wafer bonding
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Beschreibung
Zusammenfassung:A review of some of the work in tunable RF MEMS elements is presented. Discussed are a high-tuning range variable capacitor, a tunable microinductor, a switched inductor array and a MEMS capacitor immersed in a dielectric fluid. These devices expand the types of devices available to the RF designer for enhanced RF circuits.
DOI:10.1109/ICSICT.2004.1435153