Leakage loss in trench-bulge waveguides

This paper shows that leakage loss is an important loss mechanism in integrated optical trench-bulge waveguides. The propagation losses due to leakage can easily exceed 1 dB/cm in these waveguide geometries. By simply using a deeper trench or a cavity in the substrate to deposit the waveguide in, th...

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Veröffentlicht in:	Journal of lightwave technology 2005-05, Vol.23 (5), p.1890-1895
Hauptverfasser:	Krause, M., Renner, H., Harke, A., Muller, J., Brinkmeyer, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Deposits Electric, optical and optoelectronic circuits Electronics Etching Exact sciences and technology Geometrical optics Geometry Holes Integrated optics Integrated optics. Optical fibers and wave guides Leakage leakage loss leaky modes Noise levels Optical and optoelectronic circuits Optical losses Optical scattering Optical waveguide components Optical waveguides Propagation losses Silicon trench-bulge waveguides Trenches Wave propagation waveguide losses Waveguides
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Beschreibung
Zusammenfassung:	This paper shows that leakage loss is an important loss mechanism in integrated optical trench-bulge waveguides. The propagation losses due to leakage can easily exceed 1 dB/cm in these waveguide geometries. By simply using a deeper trench or a cavity in the substrate to deposit the waveguide in, the leakage losses can be reduced dramatically.
ISSN:	0733-8724 1558-2213
DOI:	10.1109/JLT.2005.844492