Sensorized nanoliter reactor chamber for DNA multiplication

This paper presents thermal analysis verification of a sensorized 50 nl reactor chamber for DNA amplification based on PCR (polymerase chain reaction). The reactor is equipped with an integrated heater, temperature sensor and a photo detector for real time detection. Through micromachining, the thermal capacity of each chamber is minimized, enabling rapid PCR cycling. The proposed structure was implemented on a silicon substrate using a standard CMOS process and postprocessing. The chambers have a bottom area of 500/spl times/500 /spl mu/m/sup 2/ and a pitch of 1 mm. An array of 96 reactors can be formed on a square centimeter. In order to reach the required PCR temperature levels (55/spl deg/C, 75/spl deg/C and 92/spl deg/C) dedicated electronics, based on a proportional-integral (PI) controller were designed and built. The system is capable of stabilizing the temperature of the reactor and performing a temperature sweep up to 100/spl deg/C.