Improved drift in two-phase, long-channel, shallow buried-channel CCDs with longitudinally nonuniform storage-gate implants

Two-phase buried-channel charge-coupled devices (CCDs) with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magni...

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Veröffentlicht in:IEEE transactions on electron devices 1992-07, Vol.39 (7), p.1772-1774
Hauptverfasser: Lattes, A.L., Munroe, S.C., Seaver, M.M., Murguia, J.E., Melngailis, J.
Format: Artikel
Sprache:eng
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Zusammenfassung:Two-phase buried-channel charge-coupled devices (CCDs) with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magnitude, consistently with two-dimensional simulations.< >
ISSN:0018-9383
1557-9646
DOI:10.1109/16.141248