Improved drift in two-phase, long-channel, shallow buried-channel CCDs with longitudinally nonuniform storage-gate implants
Two-phase buried-channel charge-coupled devices (CCDs) with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magni...
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Veröffentlicht in: | IEEE transactions on electron devices 1992-07, Vol.39 (7), p.1772-1774 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Two-phase buried-channel charge-coupled devices (CCDs) with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magnitude, consistently with two-dimensional simulations.< > |
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ISSN: | 0018-9383 1557-9646 |
DOI: | 10.1109/16.141248 |