MOS-transistors on the Si:Ho in the technology of SHF-devices
MOSFET-transistors are active elements of SHF integrated circuits. The SHF-transistor parameters optimization method has been designed. It is shown that holmium doping of silicon can be useful in the technology of SHF-devices. The use of silicon doped by holmium allows the improving of the character...
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Format: | Tagungsbericht |
Sprache: | eng ; rus |
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Zusammenfassung: | MOSFET-transistors are active elements of SHF integrated circuits. The SHF-transistor parameters optimization method has been designed. It is shown that holmium doping of silicon can be useful in the technology of SHF-devices. The use of silicon doped by holmium allows the improving of the characteristics of MOS structures. |
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DOI: | 10.1109/CRMICO.2004.183328 |