High-resolution EUV imaging using high harmonic generation

We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated

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Bibliographische Detailangaben
Hauptverfasser:	Libertun, A.R., Bartels, R.A., Liu, Y., Attwood, D.T., Zhang, X., Paul, A., Raymondson, D., Gershgoren, E., Gagnon, E., Backus, S., Murnane, M.M., Kapteyn, H.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Charge coupled devices Frequency conversion High-resolution imaging Mirrors Nonhomogeneous media Optical harmonic generation Optical imaging Power harmonic filters Ultrafast optics Ultraviolet sources
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Beschreibung
Zusammenfassung:	We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated