Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses

The damage threshold fluence (/spl sim/ 0.08 J/cm/sup 2/) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.

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Bibliographische Detailangaben
Hauptverfasser:	Vaschenko, G., Grisham, M., Menoni, C.S., Rocca, J.J., Pershyn, Yu.P., Zubarev, E.N., Voronov, D.L., Sevryukova, V.A., Kondratenko, V.V., Vinogradov, A.V., Artioukov, I.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Coatings Laser theory Mirrors Nonhomogeneous media Optical pulses Power lasers Scanning electron microscopy Surface emitting lasers Ultraviolet sources X-ray lasers
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Beschreibung
Zusammenfassung:	The damage threshold fluence (/spl sim/ 0.08 J/cm/sup 2/) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.