Nanomotion measurement by phase conjugate interferometry

A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy.

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Bibliographische Detailangaben
Hauptverfasser: Kurtz, R.M., Pradhan, R.D., Aye, T.M., Savant, G.D., Klein, M.V.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy.