Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.

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Bibliographische Detailangaben
Hauptverfasser: Moktadir, Z., Prakash, G.V., Koukharenko, E., Gollasch, C., Bagnall, D.M., Kraft, M., Hinds, E., Baumberg, J.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Anisotropic magnetoresistance
Etching
Geometrical optics
Gold
Micromirrors
Optical device fabrication
Optical polarization
Optical sensors
Shape
Silicon
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Beschreibung
Zusammenfassung:We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.