Measurement of VLSI power supply current by electron-beam probing

Measurement of VLSI power supply current by electron-beam probing

The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. It is noted that power supply voltages are obtained simultaneously. This measurement method is pa...

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Veröffentlicht in:IEEE journal of solid-state circuits 1992-06, Vol.27 (6), p.948-950
Hauptverfasser: Jenkins, K.A., Franch, R.L.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Circuit noise
Circuit testing
Current measurement
Current supplies
Electronics
Exact sciences and technology
Noise measurement
Power measurement
Power supplies
Printed circuits
Semiconductor device measurement
Testing, measurement, noise and reliability
Very large scale integration
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Zusammenfassung:The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. It is noted that power supply voltages are obtained simultaneously. This measurement method is particularly useful when combined with a larger program of circuit characterization, or design verification, by electron-beam probing.< >
ISSN:0018-9200
1558-173X
DOI:10.1109/4.135341