Adsorbed mass and resonant frequency fluctuations of a microcantilever caused by adsorption and desorption of particles of two gases

Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical...

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Hauptverfasser:	Djuric, Z., Jokic, L., Frantlovic, M., Jaksic, O., Vasiljevic-Radovic, D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Atmosphere Atmospheric modeling Electrons Exact sciences and technology Fluctuations Gases General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Nitrogen Performance analysis Physics Resonant frequency Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Silicon Solids
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Beschreibung
Zusammenfassung:	Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical approach. The analogy between Shockley-Read generation-recombination processes of electrons in solids and adsorption-desorption processes of particles of a two gas atmosphere around the cantilever is shown. Simulation is given for a silicon microcantilever surrounded by nitrogen and hydrogen.
DOI:	10.1109/ICMEL.2004.1314592