Integration of micro-optics and micromechanics

Micro-optics includes a family of optical components and systems that are fabricated with the aid of modern micromachining. The major strength of micro-optics compared to conventional optics lies in the fact that micro-optics allows the fabrication of large arrays of various optical elements for com...

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Bibliographische Detailangaben
1. Verfasser:	Herzig, H.P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Integrated optics Micromechanical devices Optical arrays Optical device fabrication Optical diffraction Optical filters Optical interconnections Optical refraction Optical surface waves Surface emitting lasers
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Beschreibung
Zusammenfassung:	Micro-optics includes a family of optical components and systems that are fabricated with the aid of modern micromachining. The major strength of micro-optics compared to conventional optics lies in the fact that micro-optics allows the fabrication of large arrays of various optical elements for complex beam-shaping tasks and the integration of large optical system. The emergence of replication techniques such as injection molding allows low cost mass-production.
DOI:	10.1109/CLEOE.2003.1313729