Parallel-beams/lever electrothermal out-of-plane actuator

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculation...

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Bibliographische Detailangaben
Hauptverfasser:	Deladi, S., Krijnen, G., Elwenspoek, M.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Adhesives Analytical models Applied sciences Computer science control theory systems Control theory. Systems Electronics Electrothermal effects Exact sciences and technology Fabrication Materials testing Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical devices Numerical simulation Packaging Robotics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Temperature
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