Parallel-beams/lever electrothermal out-of-plane actuator

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculation...

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Bibliographische Detailangaben
Hauptverfasser:	Deladi, S., Krijnen, G., Elwenspoek, M.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Adhesives Analytical models Applied sciences Computer science control theory systems Control theory. Systems Electronics Electrothermal effects Exact sciences and technology Fabrication Materials testing Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical devices Numerical simulation Packaging Robotics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Temperature
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Beschreibung
Zusammenfassung:	We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.
DOI:	10.1109/DTIP.2003.1287017