The application of three-intensity measurement technique in ellipsometry

A three-intensity technique is applied in ellipsometry for measuring the ellipsometric parameters of a polymer thin film surface. In addition to the thickness of polymer film, the regions of pure substrate, intermediate and polymer are studied separately.

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Bibliographische Detailangaben
Hauptverfasser:	Lee, K.Y., Chen, C.J., Chao, Y.F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chaos Dielectric measurements Dielectric substrates Dielectric thin films Ellipsometry Measurement techniques Optical films Optical polarization Polymer films Thickness measurement
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Beschreibung
Zusammenfassung:	A three-intensity technique is applied in ellipsometry for measuring the ellipsometric parameters of a polymer thin film surface. In addition to the thickness of polymer film, the regions of pure substrate, intermediate and polymer are studied separately.
DOI:	10.1109/CLEOPR.2003.1277127