The effect of low-k dielectrics on RFIC inductors

This paper presents design, fabrication, and optimization of high quality factor (Q) inductors on low dielectric polymers implemented on a high resistivity silicon substrate. Both Benzocyclobutene (BCB) and SU-8/spl trade/ dielectrics were used as low dielectric material. A maximum Q > 20 at 8GHz...

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Bibliographische Detailangaben

Hauptverfasser:	Jong-Hyeok Jeon, Inigo, E.J., Reiha, M.T., Tae-Young Choi, Lee, Y., Mohammadi, S., Katehi, L.P.B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Conductivity Design optimization Dielectric materials Dielectric substrates Fabrication Inductors Polymers Q factor Radiofrequency integrated circuits Silicon
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