High-speed photodiodes with reduced dark current and enhanced responsivity in the blue/UV spectra

High-speed photodiodes with reduced dark current and enhanced responsivity in the blue/UV spectra

A novel photodiode for the blue/UV spectral range, which is compatible to standard bulk CMOS or BiCMOS technology processes, is presented. The new diode structure is compared to an equivalent diode structure, processed with conventional contact fingers. Quantum efficiencies of 62% and 93.3% were mea...

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Bibliographische Detailangaben
Hauptverfasser: Hohenbild, M., Seegebrecht, P., Pless, H., Einbrodt, W.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bandwidth
BiCMOS integrated circuits
CMOS process
CMOS technology
Dark current
Diodes
Fingers
Laser noise
Photodiodes
Wavelength measurement
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Beschreibung
Zusammenfassung:A novel photodiode for the blue/UV spectral range, which is compatible to standard bulk CMOS or BiCMOS technology processes, is presented. The new diode structure is compared to an equivalent diode structure, processed with conventional contact fingers. Quantum efficiencies of 62% and 93.3% were measured for blue (405 nm) and red (638.3 nm) laser light, respectively. A -3 dB bandwidth of over 259 MHz is determined for both wavelengths. The low dark current density of 1.2 nA/cm/sub 2/ results in a very good noise performance.
DOI:10.1109/EDMO.2003.1259978