Development of new antimony and indium dopants for ion implantation

Three antimony and indium compounds, CH 3 SbBr 2 , (SbCl 3 )·[SbCl 3 ·S(CH 3 ) 2 ] and (hfac)In(CH 3 ) 2 were synthesized and characterized by spectroscopic methods. These compounds are highly volatile with excellent thermal stability. CH 3 SbBr 2 contains only one carbon that may minimize carbon in...

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Bibliographische Detailangaben

Hauptverfasser:	Wang, Z., McMahon, C.N., Xu, C., Baum, T.H., Mayer, J., Wang, L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Business Carbon compounds Cleaning Implants Indium compounds Ion implantation Moisture Temperature Thermal decomposition Thermal stability
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