Construction and performance of a bench-top mapping positron alpha tool

Construction and performance of a bench-top mapping positron alpha tool

A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin fi...

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Bibliographische Detailangaben
Hauptverfasser: Coleman, P.G., Burrows, C.P., Knights, A.P., Sealy, B.J., Gwilliam, R.M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Dosimetry
Electron traps
Instruments
Laboratories
Physics
Positrons
Semiconductor films
Semiconductor thin films
Spectroscopy
Structural beams
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Beschreibung
Zusammenfassung:A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.
DOI:10.1109/IIT.2002.1258010