A 128 /spl times/ 128 CMOS biosensor array for extracellular recording of neural activity

Sensor arrays are a key tool in the field of neuroscience for noninvasive recording of the activity of biological networks, such as dissociated neurons or neural tissue. A high-density sensor array complementary metal-oxide-semiconductor chip is presented with 16 K pixels, a frame rate of 2 kiloframes per second, and a pitch of 7.8 /spl mu/m /spl times/ 7.8 /spl mu/m for imaging of neural activity. The related circuit and system issues as well as process aspects are discussed. A mismatch-canceling calibration circuitry with current mode signal representation is used. Results from first biological experiments are presented, which prove full functionality of the chip.