Some aspects of substrates microconfiguration for MCMs applications using laser technologies

The paper presents some experiments of using laser technology in microconfiguration for MCMs applications in MST domain. The experiments were performed on silicon and silicon/dielectric/metallic thin films. We obtain results both for surface (nets) and bulk (hole trough substrate) and established pr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cernica, I., Manea, E., Ulieru, D., Gavrilescu, D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Dielectric substrates Dielectric thin films Geometry Laser ablation Laser applications Laser beam cutting Mirrors Paper technology Rough surfaces Silicon
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