Low-noise monolithic oscillator with an integrated three-dimensional inductor

Low-noise monolithic oscillator with an integrated three-dimensional inductor

A balanced silicon BiCMOS oscillator using self-assembled curled circular spring 3D inductor with peak Q of 40 reduces phase noise by 12.3dB at 100kHz offset compared to conventional planar spiral inductor approach. The addition of a 5/spl mu/m copper underlayer raises Q to 85.

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Bibliographische Detailangaben
Hauptverfasser: Van Schuylenbergh, K., Griffiths, B., Chua, C.L., Fork, D.K., Jeng-Ping Lu
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Active inductors
Atomic layer deposition
Circuit testing
Coils
Mobile communication
Q factor
Radio frequency
Springs
Substrates
Voltage-controlled oscillators
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Beschreibung
Zusammenfassung:A balanced silicon BiCMOS oscillator using self-assembled curled circular spring 3D inductor with peak Q of 40 reduces phase noise by 12.3dB at 100kHz offset compared to conventional planar spiral inductor approach. The addition of a 5/spl mu/m copper underlayer raises Q to 85.
ISSN:0193-6530
2376-8606
DOI:10.1109/ISSCC.2003.1234351