The study on SU-8 micro cylindrical lens for laser induced fluorescence application

In this study, a new method to realize both v-MCL (micro cylindrical lens) and h-MCL using SU-8 as lens material is demonstrated. The characterization results showed that SU-8 MCLs could not only have acceptable optical quality but function well for collimating and focusing. The advantages of fast p...

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Hauptverfasser: Jerwei Hsieh, Chun-Jen Weng, Hui-Hsiung Lin, Hung-Ling Yin, Hu, J.Y.C., Hsiao-Yu Chou, Cheng-Fung Lai, Weileun Fang
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:In this study, a new method to realize both v-MCL (micro cylindrical lens) and h-MCL using SU-8 as lens material is demonstrated. The characterization results showed that SU-8 MCLs could not only have acceptable optical quality but function well for collimating and focusing. The advantages of fast prototyping and easy integrating of SU-8 MCLs would make itself a useful tool in many applications.
DOI:10.1109/OMEMS.2003.1233469