Advances in piezo-nanopositioning technology

This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.

Bibliographische Detailangaben

Hauptverfasser:	Spanner, K., Vorndran, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Biomedical optical imaging Biotechnology Ceramics Microscopy Nanopositioning Nanotechnology Optical polymers Plastic insulation Voltage
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