Advances in piezo-nanopositioning technology

Advances in piezo-nanopositioning technology

This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.

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Bibliographische Detailangaben
Hauptverfasser: Spanner, K., Vorndran, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Biomedical optical imaging
Biotechnology
Ceramics
Microscopy
Nanopositioning
Nanotechnology
Optical polymers
Plastic insulation
Voltage
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Beschreibung
Zusammenfassung:This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
DOI:10.1109/AIM.2003.1225537