Cross-type submicron Josephson junctions using SNS technology for Josephson voltage standard applications

We have developed a very simple method for manufacturing submicrometer Josephson junctions (JJs) based on niobium and titanium layers. Together with the use of a microwave circuit consisting of modified coplanar strips this type of JJs offers the possibility of easy integration of several thousand s...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2003-06, Vol.13 (2), p.142-145
Hauptverfasser:	May, T., Schubert, M., Wende, G., Hubner, U., Fritzsch, L., Meyer, H.-G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Circuit testing Conductors Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Josephson junctions Manufacturing Metrology Metrology, measurements and laboratory procedures Microwave circuits Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Niobium Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Shape Superconducting devices Superconducting transmission lines Testing, measurement, noise and reliability Units and standards Voltage
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Beschreibung
Zusammenfassung:	We have developed a very simple method for manufacturing submicrometer Josephson junctions (JJs) based on niobium and titanium layers. Together with the use of a microwave circuit consisting of modified coplanar strips this type of JJs offers the possibility of easy integration of several thousand submicrometer junctions in a microwave circuit. Up to this point we have manufactured and successfully tested arrays with 2000 super-/normal-/super-conductor junctions with areas from 0.3 /spl mu/m/spl times/0.3 /spl mu/m to 2.0 /spl mu/m/spl times/2.0 /spl mu/m. First measurements with microwave irradiation showed stable Shapiro steps at voltages up to 40 mV and, thereby, the proper operation of all 2,000 junctions was seen.
ISSN:	1051-8223 1558-2515
DOI:	10.1109/TASC.2003.813666