Thin film resistor and conductor on Duroid/sup /spl reg// soft material

Thin film resistor and conductor on Duroid/sup /spl reg// soft material

The appearance of the RT/Duroid/sup /spl reg// without copper is not suitable for manufacturing thin film resistor and conductor due to the tissue of the material. Changing the appearance is necessary for thin film purposes. The thin film resistor and conductor are realized on the changed Duroid mat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Qin Yueli, Gao Nengwu, Xie Fei
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biological materials
Conducting materials
Conductive films
Copper
Lithography
Manufacturing
Resistors
Sputter etching
Sputtering
Transistors
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Beschreibung
Zusammenfassung:The appearance of the RT/Duroid/sup /spl reg// without copper is not suitable for manufacturing thin film resistor and conductor due to the tissue of the material. Changing the appearance is necessary for thin film purposes. The thin film resistor and conductor are realized on the changed Duroid material by sputtering, photolithography and etching technologies. The properties of the integrated resistors are discussed in detail in this paper. The method is useful to miniaturize and integrate the microwave products.
DOI:10.1109/ICMMT.2002.1187659