Design for reliability of MEMS/MOEMS for lightwave telecommunications

Design for reliability of MEMS/MOEMS for lightwave telecommunications

The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and rel...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Shea, H.R., Arney, S., Gasparyan, A., Haueis, M., Aksyuk, V.A., Bolle, C.A., Frahm, R.E., Goyal, S., Pardo, F., Simon, M.E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Failure analysis
Microelectromechanical devices
Micromechanical devices
Optical attenuators
Optical device fabrication
Optical devices
Optical feedback
Optical fiber networks
Optical modulation
Packaging
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2002.1159357