Single-wafer integrated semiconductor device processing

The authors present an overview of various single-wafer fabrication techniques for integrated processing of microelectronic devices. Numerous processing modules, sensors, and associated fabrication processes have been developed for advanced semiconductor device manufacturing. The combination of sing...

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Veröffentlicht in:	IEEE transactions on electron devices 1992-01, Vol.39 (1), p.4-32
Hauptverfasser:	Moslehi, M.M., Chapman, R.A., Wong, M., Paranjpe, A., Najm, H.N., Kuehne, J., Yeakley, R.L., Davis, C.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences CMOS technology Computer aided manufacturing Computer integrated manufacturing Electronics Exact sciences and technology Fabrication Manufacturing processes Microelectronics Production facilities Rapid thermal processing Semiconductor device manufacture Semiconductor devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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