Performances Analysis for Core-Shell Si/InxGa1-xAs FinFET

In this article, we propose the novel core-shell Si/InxGa _{{1}- {x}} As FinFETs, where an In _{{0}.{53}} Ga _{{0}.{47}} As shell channel was epitaxially grown on a silicon core fin. Based on the model calibrated using conventional bulk In _{{0}.{53}} Ga _{{0}.{47}} As FinFET, the device charac...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on electron devices 2024-08, Vol.71 (8), p.4453-4461
Hauptverfasser: Lu, Yu-Cheng, Chen, Kuan-Lun, Huang, Ping, Chen, Szu-Hung, Chen, Yu, Yi Chang, Edward, Lin, Chun-Hsiung
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this article, we propose the novel core-shell Si/InxGa _{{1}- {x}} As FinFETs, where an In _{{0}.{53}} Ga _{{0}.{47}} As shell channel was epitaxially grown on a silicon core fin. Based on the model calibrated using conventional bulk In _{{0}.{53}} Ga _{{0}.{47}} As FinFET, the device characteristics, including dc and RF performance of the core-shell FinFET, were analyzed and compared with the bulk FinFET. Due to the conduction band offset between InxGa _{{1}- {x}} As shell and Si fin, a quantum well is formed in the InxGa _{{1}- {x}} As channel region, which is lying between the high dielectric constant (HK) gate and the Si core. The advantages of the core-shell FinFET include increasing the gate controllability, enhancing the effective bandgap, and reducing the leakage current, while the on-state performance in transconductance ( {g}_{m}\text {)} and drain current ( {I}_{\text {ON}}\text {)} is maintained. The effects of varying the channel thickness, length, and the indium content of the InxGa _{{1}- {x}} As shell are also explored in both dc and RF aspects. The results show that the core-shell FinFET exhibits superior characteristics in terms of leakage current, subthreshold swing, and drain-induced barrier lowering, owing to its superior gate controllability, with comparable RF performance in current gain cutoff frequency ( {f}_{t} \gt 400 GHz for 50-nm {L}_{\text {Ch}}\text {)} with the bulk FinFET. The major objective of this article is to provide the possible directions for the design of the Si/InxGa _{{1}- {x}} As core-shell
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2024.3406265