Dual-wavelength vertical-cavity surface-emitting laser arrays fabricated by nonplanar wafer bonding

A dual-wavelength 1550 nm and 1530 nm VCSEL array is fabricated using two separate and distinct active regions integrated on a common mirror by nonplanar wafer bonding.

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Bibliographische Detailangaben
Hauptverfasser:	Geske, J., Okuno, Y.L., Bowers, J.E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Distributed Bragg reflectors Etching Optical arrays Optical films Optical surface waves Semiconductor laser arrays Substrates Surface emitting lasers Vertical cavity surface emitting lasers Wafer bonding
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Beschreibung
Zusammenfassung:	A dual-wavelength 1550 nm and 1530 nm VCSEL array is fabricated using two separate and distinct active regions integrated on a common mirror by nonplanar wafer bonding.
DOI:	10.1109/ISLC.2002.1041156