Compliant MEMS and their use in optical components

Compliant MEMS and their use in optical components

We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new M...

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1. Verfasser: Little, M.J.
Format: Tagungsbericht
Sprache:eng
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Etching
Fiber lasers
Micromechanical devices
Optical devices
Optical reflection
Optical sensors
Optical switches
Optical waveguides
Photonic crystals
Waveguide lasers
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description We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new MEMS platform and have gone through prototype development on the first of these new designs, a tunable Fabry-Perot. This new MEMS tunable filter establishes a new state of the art performance level for tunability and finesse.
doi_str_mv 10.1109/OFC.2002.1036229
format Conference Proceeding
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This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new MEMS platform and have gone through prototype development on the first of these new designs, a tunable Fabry-Perot. This new MEMS tunable filter establishes a new state of the art performance level for tunability and finesse.</description><subject>Etching</subject><subject>Fiber lasers</subject><subject>Micromechanical devices</subject><subject>Optical devices</subject><subject>Optical reflection</subject><subject>Optical sensors</subject><subject>Optical switches</subject><subject>Optical waveguides</subject><subject>Photonic crystals</subject><subject>Waveguide lasers</subject><isbn>9781557527011</isbn><isbn>1557527016</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2002</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jrEOgjAURV9iTDTa3cTl_YD4-hAqM4G4EAfdSYM11kAhtA7-vQzMTvck5wwXYCcpkpKy47XMIybiSFKcMmcLEJk6yyRRCSuScgXC-zfRhHyKU7UGzvtuaK12AauiuqF2DwwvY0f8eIPWYT8E2-gWm6nrnXHBb2H51K03Yt4N7Mvinl8O1hhTD6Pt9Pit5wfxf_sDT90zTA</recordid><startdate>2002</startdate><enddate>2002</enddate><creator>Little, M.J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2002</creationdate><title>Compliant MEMS and their use in optical components</title><author>Little, M.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_10362293</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Etching</topic><topic>Fiber lasers</topic><topic>Micromechanical devices</topic><topic>Optical devices</topic><topic>Optical reflection</topic><topic>Optical sensors</topic><topic>Optical switches</topic><topic>Optical waveguides</topic><topic>Photonic crystals</topic><topic>Waveguide lasers</topic><toplevel>online_resources</toplevel><creatorcontrib>Little, M.J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Little, M.J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Compliant MEMS and their use in optical components</atitle><btitle>Optical Fiber Communication Conference and Exhibit</btitle><stitle>OFC</stitle><date>2002</date><risdate>2002</risdate><spage>95</spage><epage>97</epage><pages>95-97</pages><isbn>9781557527011</isbn><isbn>1557527016</isbn><abstract>We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. 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subjects Etching
Fiber lasers
Micromechanical devices
Optical devices
Optical reflection
Optical sensors
Optical switches
Optical waveguides
Photonic crystals
Waveguide lasers
title Compliant MEMS and their use in optical components
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