Compliant MEMS and their use in optical components

Compliant MEMS and their use in optical components

We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new M...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Little, M.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Etching
Fiber lasers
Micromechanical devices
Optical devices
Optical reflection
Optical sensors
Optical switches
Optical waveguides
Photonic crystals
Waveguide lasers
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We have developed a new branch of MEMS devices that use a very compliant material for the bending/twisting member. This use of an elastomer suspension system significantly widens the design and performance spaces for MEMS devices. We have designed several new microoptical devices based on this new MEMS platform and have gone through prototype development on the first of these new designs, a tunable Fabry-Perot. This new MEMS tunable filter establishes a new state of the art performance level for tunability and finesse.
DOI:10.1109/OFC.2002.1036229