Micro-mirror array control of optical tweezer trapping beams

The lack of tools to manipulate nanoscale objects is a major obstacle to fabricating and testing nanodevices. Optical tweezers are a promising tool for nanomanufacturing, but the efficiency of optical tweezer manufacturing depends on the number of trapping beams available. Micro optics technology offers the opportunity to significantly increase the number of trapping beams without a significant increase of the cost or size of the optics. Here we report on the sensors, optical circuit and the experimental work to control an array of laser beams generated by a single laser diode, for optical-tweezer-based nanomanufacturing. Our array of laser beams is generated by an array of servo controlled scanning dual-axis micro-mirrors. Capacitor electrodes underneath the micro-mirror plates provide electrostatic actuation, which allows control of the micro-mirror position. With proper reflecting surfaces it is possible to control the impact angle of the individual laser beams onto the micro-nano-particles, thus generating an optical beam gripper effect.