Design and fabrication of surface-micromachined spherical mirrors

A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.

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Bibliographische Detailangaben
Hauptverfasser: Max Ti-Kuang Hou, Ke-Min Liao, Hong-Zhen Yeh, Pei-Yuan Hong, Rongshun Chen
Format: Tagungsbericht
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.
DOI:10.1109/OMEMS.2002.1031508