Design and fabrication of surface-micromachined spherical mirrors
A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized. |
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DOI: | 10.1109/OMEMS.2002.1031508 |