Low voltage PZT actuated tilting micromirror with hinge structure

Low voltage PZT actuated tilting micromirror with hinge structure

In this paper, a bulk micromachined PZT micromirror with low voltage operation, large tilting angle, and two-axes degree of freedom is discussed for optical applications. The micromirror is connected to PZT cantilevers by hinge structure to minimize mechanical constraint. The maximum tilting angle o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Hyo-Jin Nam, Young-Sik Kim, Seong-Moon Cho, Yougjoo Yee, Jong-Uk Bu
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Displays
Electrostatic actuators
Etching
Fasteners
Laboratories
Linearity
Low voltage
Micromirrors
Optical device fabrication
Optical switches
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper, a bulk micromachined PZT micromirror with low voltage operation, large tilting angle, and two-axes degree of freedom is discussed for optical applications. The micromirror is connected to PZT cantilevers by hinge structure to minimize mechanical constraint. The maximum tilting angle of the fabricated micromirror is 3.5/spl deg/ at low voltage of 40 V.
DOI:10.1109/OMEMS.2002.1031457