The study of MEMS millimeter wave phase shifter

The study of MEMS millimeter wave phase shifter

Several designs of MEMS millimeter-wave phase shifters are presented. They consist of a coplanar waveguide (CPW) transmission line periodically loaded with 8/spl sim/32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied...

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Hauptverfasser: Guo, F.M., Lai, Z.S., Zhu, S.Z., Zhu, Z.Q., Zhu, R.J., Zheng, Y., Yang, G.Q., Li, A.Z.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bridge circuits
Coplanar waveguides
Frequency
Insertion loss
Micromechanical devices
Millimeter wave communication
Millimeter wave radar
Millimeter wave technology
Phase shifters
Scattering parameters
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Beschreibung
Zusammenfassung:Several designs of MEMS millimeter-wave phase shifters are presented. They consist of a coplanar waveguide (CPW) transmission line periodically loaded with 8/spl sim/32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. One MEMS phase shifter reached to 372/spl deg//3.5 mm under 20 V bias at 35 GHz, with an insertion loss (S/sub 21/) of about 4/spl sim/7 dB.
DOI:10.1109/RAWCON.2002.1030170