Mechanism of the current quenching phenomenon in pseudospark discharge
Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed.
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| creator | Korolev, Yu.D. Frants, O.B. Geyman, V.G. Ivashov, R.V. Landl, N.V. Shemyakin, I.A. Frank, K. Bischoff, R. Iberler, M. Urban, J. |
| description | Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed. |
| doi_str_mv | 10.1109/ISDEIV.2002.1027416 |
| format | Conference Proceeding |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Anodes Boring Capacitors Cathodes Current density Electrodes Fault location Plasma density Plasma measurements Switches |
| title | Mechanism of the current quenching phenomenon in pseudospark discharge |
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