Mechanism of the current quenching phenomenon in pseudospark discharge

Mechanism of the current quenching phenomenon in pseudospark discharge

Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed.

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Bibliographische Detailangaben
Hauptverfasser: Korolev, Yu.D., Frants, O.B., Geyman, V.G., Ivashov, R.V., Landl, N.V., Shemyakin, I.A., Frank, K., Bischoff, R., Iberler, M., Urban, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Anodes
Boring
Capacitors
Cathodes
Current density
Electrodes
Fault location
Plasma density
Plasma measurements
Switches
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Beschreibung
Zusammenfassung:Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed.
DOI:10.1109/ISDEIV.2002.1027416