$A 46.6 \mu g/ \surd Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier$

A 46.6 \mu g/ \surd Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier

This article presents a single-chip accelerometer with the best reported thermal noise and the lowest bias instability among state-of-the-art accelerometers with high- g ( > 1000 g) sensing capability. Complete single-chip integration of microelectromechanical transducers, readout circuits, an...

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Veröffentlicht in:	IEEE journal of solid-state circuits 2023-06, p.1-14
Hauptverfasser:	Li, Xiaoliang, Chung, Vincent P. J., Guney, Metin G., Mukherjee, Tamal, Fedder, Gary K., Paramesh, Jeyanandh
Format:	Artikel
Sprache:	eng
Schlagworte:	1f noise Accelerometer Accelerometers analog front-end (AFE) Bandwidth bias instability capacitive sensing chopper amplifier Choppers (circuits) clock skew Clocks CMOS-MEMS delay line digital-to-time converter (DTC) flicker noise high dynamic range high-<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> g</tex-math> </inline-formula> low-noise microelectromechanical systems (MEMS) readout circuit sensor interface Sensors Transducers
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